CMOS Hotplate Chemical Microsensors (Microtechnology and by M. Graf, D. Barrettino, H.P. Baltes, A. Hierlemann

By M. Graf, D. Barrettino, H.P. Baltes, A. Hierlemann

The 1st entire textual content on microhotplate-based chemical sensor structures in CMOS-technology covers all points of profitable sensor prototyping: theoretical issues for modelling, controller- and procedure layout, simulation of circuits and microsensors, layout issues, microfabrication, packaging and trying out. an entire relatives of metal-oxide established microsensor structures with expanding complexity is gifted, together with absolutely built-in sensor arrays. This represents one of many first examples of built-in nanomaterials, microtechnology and embedded circuitry.

Show description

Read Online or Download CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS) PDF

Similar chemical books

Chemical fungal taxonomy

Deals accomplished assurance of the most recent advancements in either biochemical and physiological methods to fungal systematics. accommodates fresh advances in molecular biology into systematics equipment that may revolutionize taxonomic schemes.

Counteraction to Chemical and Biological Terrorism in East European Countries

The terrorist act with sarin gasoline within the Tokyo underground and the case with the unfold of anthrax spores throughout the U. S. postal process encouraged the improvement of orga- zation of struggle opposed to terrorism on a countrywide and worldwide point. The objective of this wo- store was once evaluation of medical recommendations and sensible potential for administration of chemical and organic brokers casualties within the zone of terrorist assaults with emphasis on enhancing the issues and state of affairs in jap eu nations.

Chemical and Pharmacological Perspective of Artemisia amygdalina

This ebook studies the chemical and organic homes of Artemisia amygdalina Decne, a significantly endangered and endemic plant species within the the high-altitude Kashmir Himalayas, which has a excessive pharmacological power. It describes the bioactivity-guided isolation of its chemical substances, their characterization utilizing spectroscopic equipment and the improvement of an easy and trustworthy RP-HPLC approach for the simultaneous quantification of the remoted parts.

Aquatic Dermatology: Biotic, Chemical and Physical Agents

This well-illustrated speedy reference ebook, now in its moment version, is a accomplished consultant to the aquatic dermis illnesses as a result of biotic and non-biotic noxae. it's going to help the dermatologist in spotting and treating a bunch of unusual stipulations which are however gradually expanding in occurrence due to wider use of the hydrosphere for vacation, game, and occupational actions all year long.

Additional resources for CMOS Hotplate Chemical Microsensors (Microtechnology and MEMS)

Example text

37), self-heating occurs with a resistive heater, so that the thermal time constant has to be determined during the cooling cycle. 4 Calibration of the Temperature Sensors The discrete microhotplates were packaged and bonded in a DIL-28 package for temperature sensor calibration. A Pt-100-temperature sensor was attached to the chip package in close vicinity to the sensors. The chips were then calibrated in an oven at temperatures up to  C with the help of the Pt-100 resistor. 1 Circular Microhotplate 37 The calibration was done for temperatures between  C and  C.

The input parameters for a lumped-model description (Sect. 4) of the microhotplate are calculated from the simulation results. An AHDL (Analog Hardware Description Language) model, which then will be used for a circuitry simulation of the complete sensor system, is derived from the lumpedmodel equations in Sect. 5. 1) where j(x,t) denotes the heat flux, and κ(x,T(x,t)) is the heat conductivity that locally depends on the temperature. T(x,t) denotes the temperature field as a function of the 3-dimensional coordinate x.

3 Microhotplate with Pt Temperature Sensor CMOS metallization Pt-temperature sensor thick-film SnO2 resistor local passivation bondpad 45 CMOS passivation n-well Si-island poly-Si ring heater Pt-metallization Pt-electrodes poly-Si temperature sensor Fig. 11. Cross-sectional schematic of the high-temperature microhotplate on the bulk chip and no more in the heated membrane center. The Pt-elements have to be protected by a passivation layer, and the passivation has to be opened again to contact the sensitive layer to enable resistive measurements.

Download PDF sample

Rated 4.75 of 5 – based on 41 votes