By Jeffrey B. Fortin Ph.D., Toh-Ming Lu Ph.D. (auth.)
Chemical Vapor Deposition Polymerization - the expansion and houses of Parylene skinny Films is meant to be worthy to either clients and researchers of parylene skinny movies. it's going to be really precious for these developing and characterizing their first learn deposition method. It offers an excellent photograph of the deposition approach and kit, in addition to info on system-to-system adaptations that's vital to think about while designing a deposition procedure or making adjustments to an present one. additionally incorporated are the way to characterizae a deposition system's pumping houses in addition to video display the deposition strategy through mass spectrometry. there are various references that might lead the reader to additional details at the subject being mentioned.
This textual content may still function an invaluable reference resource and instruction manual for scientists and engineers attracted to depositing prime quality parylene skinny films.
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Extra info for Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films
50 Q. 40 ~ l5 a. ~ [+E-;-ierimenlal ..... 1: The measured and extrapolated dimer vapor pressure from reference . in the gas phase via 193 nm laser photolysis . Mariella et al. sublimated the dimer and deposited it as thin layers on a substrate and subsequently converted the dimer directly to polymer by irradiation via deep ultraviolet « 250 nm) radiation (photopolymerization) . 1 Thermodynamics Boyd determined the strain energy of the dimer to be 130 kJ jmole by comparing the experimental heat of formation of the gaseous dimer with that expected for an unstrained reference structure .
There are two common routes to the synthesis of the dimer, di-para-xylyene; the direct pyrolysis of p-xylene and the 1,6 Hoffman elimination of amine from a quaternary ammonium hydroxide [IJ. Beach et at. also state that purification of the dimer is often accomplished by recrystallization from the solvent xylene. The dimer has received considerable research attention due to its interesting strained ring system. The two benzene rings are held parallel to each other and joined via carbon bridges attached at the para positions.
Amu/e Composition Parent Ion 2 H+ 2 Monomer? 18 H 2O+ Water 27 C2Ht Xylene 28 C2Ht,N2 Monomer, Nitrogen 39 C3 Ht,C6 H t+ Monomer 50 C4 Hi Monomer 51 c4 H t Monomer 52 C4 Ht,CsHi+ Monomer 63 C5 Ht Monomer 77 C6 H : Monomer 78 C6H: Monomer 102 CsH: Monomer 103 CsHi Monomer 104 CsH: Monomer Error bars are shown only for the quartz liner to avoid cluttering the data. The error in percent conversion for the other liners is the same as that for the quartz. It is important to note that the residence time of the dimer in the pyrolysis zone affects the conversion to some degree, therefore, this curve should only be used as a reference and not considered directly applicable to every parylene deposition system.